A method of obtaining large-scale 2D arrays of ordered metallic nanoparticles is presented. The arrays were prepared using nanosphere lithography based on the self-assembly of latex particles on a water surface. Using 496 nm and 1040 nm diameter particles, it was possible to prepare arrays of over one cm^2, with defect-free areas of over 50μ m^2. By the evaporation of nickel or gold, periodic metallic particle arrays were produced. Modification of the particle array morphology was also shown by using double-layered masks. Computer simulated mask models were used to reveal interesting morphologies obtainable by the application of multilayered masks.
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