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Growth, Morphology and Superconductivity of Epitaxial (RE)_{1}Ba_{2}Cu_{3}O_{7-δ} Films on SrTiO_{3} and NdGaO_{3} Substrates

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Krumme J.-P., David B., Doormann V., Eckart R., Rabe G., Dössel O.

Acta Physica Polonica A

1997

vol. 92

issue 1

55-68

The growth of (RE)_{1} Ba_{2}Cu_{3}O_{7-δ} (RE: Y, Nd) films on NdGaO_{3} and SrTiO_{3} substrates by ion-beam and dc-/rf-magnetron sputter deposition is discussed in the framework of growth kinetics, oxygen exchange, epitaxial relations, substrate crystal orientation, in-plane coherence, vicinal substrate cuts, overgrowth on steps, superconductor/insulator combinations, and patterning by ion-beam etching. The process conditions for ion-beam and magnetron sputter deposition are briefly outlined.

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1 Acta Physica Polonica A

1 1997

1 David B.

1 Doormann V.

1 Dössel O.

1 Eckart R.

1 Krumme J.-P.

1 Rabe G.

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Growth, Morphology and Superconductivity of Epitaxial (RE)_{1}Ba_{2}Cu_{3}O_{7-δ} Films on SrTiO_{3} and NdGaO_{3} Substrates