Tilting the magnetic easy axis of L1₀ FePt and/or introducing a magnetic buffer layer is most effective in realizing the L1₀ based magnetic recording media. Here we report on preferentially oriented growth of L1₀ FePt with tilted magnetic easy axis. FePt films of thickness up to 170 nm were deposited on Si substrate with a soft magnetic underlayer of glassy FeSiB, FeSiBP and CoFeTaB. Effects of processing conditions on the structural and magnetic properties were studied. A polycrystalline growth of FePt (i.e. mixed orientation) was observed with the underlayer of FeSiB and FeSiBP, but CoFeTaB promotes preferentially oriented growth along (111) crystallographic direction. Compared to FePt films grown on Si substrate, coercivity (H_{c}) reduces significantly with the introduction of soft magnetic underlayer. The magnetic easy axis of (111) L1₀ FePt is tilted 36 out of plane and it is very promising for tilted magnetic recording media.
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