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Direct Measurements of Arsenic and Phosphorus Evolution During Cap-Annealing of Gold-Based Metallizations on GaAs and InP

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Piotrowska A., Kamińska E., Guziewicz M., Veresegyhazy R., Mojzes I., Pecz B.
Acta Physica Polonica A
|
1991
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vol. 80
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issue 3
457-460
EN
Evolution of arsenic and phosphorus during heat treatment of unprotected and encapsulated Au, AuZn and AuGeNi contacts on GaAs and InP has been examined and correlated with their ohmic behavior.
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