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EN
Various imaging methods and techniques capable of reaching a nanometer spatial resolution are currently under development. One of them is an extreme ultraviolet microscopy, based on the Fresnel zone plates. In this paper a compact, high-repetition, laser-plasma EUV source, with a gas puff target, capable of emitting quasi-monochromatic radiation at 13.8 nm wavelength was used in the first demonstration of a desk-top EUV transmission microscopy with a spatial (half-pitch) resolution of 50 nm. EUV microscopy images of objects with various thicknesses and the spatial resolution measurements using the knife-edge test are presented.
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EUV-Induced Nanostructuring of Solids

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EN
In this work results of investigations concerning nanostructuring of polymers and some other solids using a laser-plasma extreme ultraviolet source are presented. The plasma radiation was produced using a gas puff target and focused with a gold-plated grazing incidence ellipsoidal collector. Decomposition process of polymers was investigated using a quadrupole mass spectrometer. Different kinds of micro- and nanostructures created in near-surface layers of the materials were investigated using scanning electron microscope. Forms of the structures depend on a particular material and the extreme ultraviolet exposure. In case of some polymers even a single shot is sufficient for creation of the visible changes in surface morphology. In case of inorganic solids visible changes require usually the exposure with tens or hundreds of extreme ultraviolet pulses.
EN
Extreme ultraviolet (EUV) covers wavelength range from about 5 nm to 50 nm. That is why EUV is especially applicable for imaging and patterning on nanometer scale length. In the paper periodic nanopatterning realized by interference lithography and high resolution holographic nanoimaging performed in a Gabor in-line scheme are presented. In the experiments a compact table top EUV laser was used. Preliminary studies on using a laser plasma EUV source for nanoimaging are presented as well.
EN
In this paper, results of surface modification, using a laser-produced plasma source of extreme ultraviolet, and the extreme ultraviolet induced low temperature plasmas, are presented. It was shown that irradiation of different materials by intense extreme ultraviolet pulses results in strong changes of the surface morphology. Examples of micro- and nanostructures obtained this way are presented. It was also demonstrated that a dual action of the radiation pulses and low temperature plasmas allows to modify a molecular structure of exposed materials.
EN
A compact soft X-ray microscope based on a nitrogen double-stream gas puff target soft X-ray source, operating at He-like nitrogen spectral line at the wavelength of λ =2.88 nm is presented. The desk-top size microscope was successfully demonstrated in transmission mode using the Fresnel zone-plate objective and it is suitable for soft X-ray source microscopy in the "water window" spectral range (λ = 2.3÷ 4.4 nm). Details about the soft X-ray source source, the microscope and an example of application in the biomedical field are shown and discussed.
EN
In this work we present recent results on nanoscale imaging in the extreme ultraviolet and soft X-ray spectral ranges, describing three novel imaging systems dedicated for high spatial resolution imaging of nanoscale objects with the extreme ultraviolet and soft X-ray radiations. The extreme ultraviolet and soft X-ray full field microscopes operate at 13.8 nm and 2.88 nm wavelengths and are capable of imaging of nanostructures with a sub-50 nm spatial resolution. A soft X-ray contact microscope operates in the "water-window" spectral range from 2.3 to 4.4 nm wavelength, to obtain images of an internal structure of the investigated object in a thin surface layer of soft X-ray light sensitive photoresist. The development of such compact imaging systems may, in the near future, be important from the point of view of new research related to biological, material science, and nanotechnology applications. Such preliminary applications are also shown in the studies of biological samples, including carcinoma cells, diatoms, and neurons.
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Biological Action in and out of the Water Window

52%
EN
This study is dealing with the difference of radiation chemical yields of single and double strand breaks induced in plasmid DNA by photons inside and outside of the soft X-ray water window, i.e., in the wavelength range from 2.28 nm to 4.88 nm. Photons were generated by various plasma sources providing nanosecond and sub-nanosecond pulses of extreme ultraviolet, soft X-ray and X-ray radiation. DNA strand breaks were determined by agarose gel electrophoresis. Higher radiation chemical yields of both single and double strand breaks were found using picosecond and nanosecond sources of extreme ultraviolet and X-ray radiation.
EN
Soft X-ray contact microscopy potentially allows imaging of wet living biological specimens at a spatial resolution higher than optical microscopy and without many of the constraints of scanning electron microscopy. In this paper, we present the development of a laboratory scale contact microscope that uses a laser produced plasma soft X-ray source. The source is based on a double-stream gas-puff target approach and it operates in the "water window" spectral range which enables to capture images of biological samples with a natural contrast. In the preliminary experiments the contact microscope system has been used for imaging of fixed and dried non-malignant HCV29 human bladder cell lines cultured on polymethyl methacrylate photoresists. The samples were exposed with 150 pulses of soft X-rays as an initial test to demonstrate the possibility of image formation. The soft X-ray contact images registered in the photoresists exhibit high resolution in the atomic force microscopy topography which indicates the potential application of soft X-ray contact microscopy in life science to examine small features as small as few tens of nm. The technique could also be used for living cell imaging with further optimization of the microscope system and development of a special specimen holder. The details of the soft X-ray contact microscopy technique and the experimental results are presented and discussed.
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