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Investigation of H_2:CH_4 Plasma Composition by Means of Spatially Resolved Optical Spectroscopy

100%
Bogdanowicz R.
Acta Physica Polonica A
|
2008
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vol. 114
|
issue 6A
A-33-A-38
EN
The system based on spatially resolved optical emission spectroscopy dedicated for in situ diagnostics of plasma assisted CVD processes is presented in this paper. Measurement system coupled with chemical vapour deposition chamber by dedicated fiber-optic paths enables investigation of spatial distribution of species densities (H_x, H^+, CH, CH^+) during chemical vapour deposition process. Experiments were performed for a various gas inlet configuration at range of microwave power up to 800 W. Spatially resolved optical spectroscopy results showed that inlet configuration based on injecting hydrogen in ECR region and methane in substrate area is the most efficient for H^+ and CH_{3}^{+} excitation. The designed prototype of the spatially resolved optical spectroscopy system enables the high-sensitivity measurements of concentration of the species in the microwave plasma and can be used for optimisation of diamond-like carbon synthesis.
2
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Nanocrystalline CVD Diamond Coatings on Fused Silica Optical Fibres: Optical Properties Study

51%
Ficek M., Bogdanowicz R., Ryl J.
Acta Physica Polonica A
|
2015
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vol. 127
|
issue 3
868-873
EN
Seeding and growth processes of thin diamond films on fused silica optical fibres have been investigated. Glass pre-treatment by dip coating in two detonation nanodiamond (DND) seeding media has been studied. The DND suspension in ethyl alcohol and dispersion of DND in dimethyl sulfoxide (DMSO) with polyvinyl alcohol (PVA) were chosen for the seeding purpose. The grain size distribution of nanodiamond particles in both seeding media was kept at the same level (approximately 10-50 nm). After the seeding nanocrystalline diamond films were deposited on the fibres using microwave plasma assisted chemical vapour deposition system. The results of the process were investigated using numerical analysis of scanning electron microscopy images. The molecular structure of diamond has been examined with micro-Raman spectroscopy. Thickness, roughness and optical properties of the nanocrystalline diamond films in VIS-NIR wavelength range were investigated on reference samples using spectroscopic ellipsometry. Light reflection at the fibre end-face for different deposition parameters was also investigated. Proposed seeding method can be further effectively applied for manufacturing of optical fibre sensors. Due to extraordinary properties of diamond, which include high chemical and mechanical resistance, such films are highly desired for optical sensing purposes.
3
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Optimization of Polycrystalline CVD Diamond Seeding with the Use of sp³/sp² Raman Band Ratio

39%
Golunski L., Sobaszek M., Gardas M., Gnyba M., Bogdanowicz R., Ficek M., Plotka P.
Acta Physica Polonica A
|
2015
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vol. 128
|
issue 1
136-140
EN
The influence of various nanodiamond colloids used for seeding nondiamond substrates in microwave plasma enhanced chemical vapour deposition diamond process was investigated. Colloids based on deionized water, isopropanol alcohol and dimethyl sulfoxide (DMSO) were used with different grain size dispersion: 150, 400 and 35 nm, respectively. The influence of growth time was also taken into consideration and bias enhanced nucleation. Microcrystalline diamond films were deposited on the seeded substrates in microwave plasma chemical vapour deposition using hydrogen-methane gas mixture. Seeding efficiency was investigated by means of scanning electron microscopy and Raman spectroscopy. Authors defined the new factor called as diamond ideality factor (di) which can give a quick estimation of quality of film and relative sp³ content. Few main peaks were identified at the following wave numbers: diamond sp³ peak 1332 cm^{-1}, D band peak 1355 cm^{-1}, C-H bending peak 1440-1480 cm^{-1} and G band peak 1560 cm^{-1}. The best di was achieved for DMSO based colloid in all cases. The application of bias enhanced nucleation increases the diamond crystals size and the sp³/sp² ratio.
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