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Electron Beam Induced Modification of Polymer-Like Carbon Coatings

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Plaipaitė-Nalivaiko R., Adlienė D., Adlys G.
Acta Physica Polonica A
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2013
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vol. 123
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issue 5
871-873
EN
Carbon coatings can possess diamond-like, polymer-like, graphite-like or other properties depending on deposition methods and technological parameters. Structural changes in the polymer-like carbon coatings irradiated by high energy electrons are discussed in the present paper. The polymer-like carbon coatings have been synthesized from C_2H_2 gas in the radio frequency dual-plasma reactor using various deposition parameters. Plasma enhancement chemical vapor deposition deposited experimental polymer-like carbon samples were irradiated with high energy electrons in the medical linear accelerator. The investigations of carbon coatings have been carried out using the Fourier-transform infrared, Raman and UV-VIS spectroscopies. Modification of the polymer-like carbon coatings is discussed in relation with radiation induced formation of free radicals and unsaturated bonds along with possible cross-linking processes.
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Temperature Dependent Variations of Properties of Polymer-Like Carbon Coatings Treated with High Energy Electrons

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Plaipaitė-Nalivaiko R., Vigricaitė L., Adlienė D., Rutkūnienė Ž.
Acta Physica Polonica A
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2015
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vol. 128
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issue 5
915-917
EN
Polymer-like carbon coatings can be used for the protection of micro-electromechanical devices functioning in chemically or radiation harsh environment due to their beneficial properties. Properties of carbon coatings depend on the method of synthesis, initial gas mixture, admixture of additives, temperature and other technological parameters. Modification of carbon structures is possible applying high energy electrons. Coating mechanical properties become almost stable after their pretreatment with some doses of high energy electrons. Polymer-like carbon coatings were synthesized from acetylene gas plasma on n-type silicon substrates in the RF plasmotron system at temperatures in the range 293-673 K using plasma enhanced chemical vapor deposition method. Series of samples were prepared and irradiated with high energy (6 MeV) electrons in a medical linear accelerator. The ellipsometric method was used for estimation of some optical parameters and thickness of synthesized coatings. Structural changes of polymer-like carbon coatings were evaluated using the Raman spectroscopy and surface morphology was assessed by atomic force microscopy. Electron beam induced structural changes in the coatings were analyzed using the obtained results. The relations between the synthesis temperature and samples structure and surface morphology are discussed.
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