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Influence of Substrate Temperature on Magnetic and Structural Properties of RF Magnetron Sputtered Co-Cr Thin Films

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Baek J.-S., Kim Y.-Y., Lim W.-Y., Kim Y.-D., Yu S.-C.

Acta Physica Polonica A

1997

vol. 91

issue 2

307-310

The present paper describes the substrate temperature T_{s} dependence on magnetic and structural properties of Co-21 at.% Cr thin films deposited on the Corning glass substrate by RF magnetron sputtering. The properties of the samples, such as saturation magnetization M_{s}, in-plane squareness ratio S_{∥}, effective magnetic anisotropy field H'_{k}, spectroscopic splitting factor g, and hcp (002) peak intensity I_{002}, were examined by vibrating sample magnetometer, Q-band (≈ 33.9 GHz) ferromagnetic resonance measurements and X-ray diffractometry. Specially, the presence of the various ferromagnetic constituents in Co-Cr thin films are examined by the ferromagnetic resonance studies. With increasing T_{s} from room temperature to 200°C, S_{∥} increases from 0.08 to 0.56 but H'_{k} decreases from 2530 Oe to -3900 Oe. Also I_{002} decreases with increasing T_{s}. It is summarized that the perpendicular magnetic anisotropy and c-axis orientation of Co-Cr films are improved at lower substrate temperature.

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1 Acta Physica Polonica A

1 1997

1 Baek J.-S.

1 Kim Y.-D.

1 Kim Y.-Y.

1 Lim W.-Y.

1 Yu S.-C.

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Influence of Substrate Temperature on Magnetic and Structural Properties of RF Magnetron Sputtered Co-Cr Thin Films