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EN
A bilayer sensor structure of nickel oxide NiO_x ( ≈ 60 nm) with a very thin film of palladium (Pd ≈ 18 nm) on the top, has been studied for gas-sensing application at relatively low temperatures of about 30°C and 60°C. The bilayer structure was obtained by rf sputtering and by vacuum deposition (first the NiO_{x} and then the Pd film) onto a LiNbO_{3} Y-cut Z-propagating substrate, making use of the surface acoustic wave method, and additionally (in the same technological processes) onto a glass substrate with a planar microelectrode array for simultaneous monitoring of the planar resistance of the layered structure. Such a bilayer structure was investigated in a low concentration range (from 50 ppm to 400 ppm in air) of nitrogen dioxide (NO_{2}), carbon monoxide (CO) and ammonia (NH_{3}) in a dry and wet air atmosphere and in a medium hydrogen concentration (1-2.5%) in dry air. The NiO_{x} and Pd bilayer structure interact rather weakly with NO_{2} molecules but with CO and NH_{3} this interaction is much greater, especially at higher temperature ( ≈ 60°C). The hydrogen sensitivity is on the medium level, not exceeding 600 Hz (relative change in the differential frequency of ≈ 2.3%) at interaction temperature of 35°C.
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issue 6
1153-1157
EN
A Rayleigh acoustic wave travelling on the surface of a semi-infinite piezoelectric medium may be changed by interaction with carriers and diffused gas in an adjacent semiconductor. The configuration, which uses a thin semiconductor film supported by a catalytic layer (Pd), is described in detail and the theoretical results of gas-sensor layer interaction are presented.
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issue 6
1158-1160
EN
The paper presents the numerical results of investigations of the layered gas surface acoustic waves sensor. The base electric load of the piezoelectric acoustic line is predicted by the effect of surface acoustic waves velocity changes vs. surface conductivity, which depends on the profile concentration by gas diffused molecules into the porous film. Inside the sensor layer Knudsen's model of gas diffusion was used.
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issue 6
1148-1152
EN
In the paper a new theoretical model for analyzing a surface acoustic wave gas sensor is presented. Basing on the electric load of the piezoelectric acoustic line the effect of surface acoustic wave velocity changes vs. surface conductivity is predicted which depends on the profile concentration of gas molecules diffused into the porous film. Inside the sensor layer Knudsen's model of gas diffusion was used.
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