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The comprehensive analysis of transmission spectra for light propagated through ITO/ZnO/CdS multilayers to solar cell active layer of CdTe is performed. Optimal thickness of ZnO high resistive oxide supplying minimal optical losses in CdTe solar cell working range was determined. We get the maximal light transmission to active layer for ZnO film with thickness of 230 nm. The advantages of glass superstrate for multilayer structure with ZnO upper layer is discussed in comparison with the structure with ITO upper layer. Calculation of transmittance for textured surfaces of top face of solar element showed significant minimization of optical losses in the structure with ITO upper layer textured by inverted pyramids while for textured glass superstrate there is no ponderable profit as compared to multilayer structure with planar surface.
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