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Fluorination Under NF_{3} Flow of Oxygen Deficient YBa_{2}Cu_{3}O_{x} Thin Films Deposited on Various Types of Substrate

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Massiot P., Perrin C., Guilloux-Viry M., Perrin A., Sergent M.

Acta Physica Polonica A

1997

vol. 92

issue 1

221-225

Oxygen deficient YBaCuO thin films, c-epitaxially grown by laser ablation on different substrates such as (100)MgO, (100)SrTiO_{3} and (100)LaAlO_{3}, were fluorinated by an ex situ solid/gas reaction with NF_{3} (3% NF_{3} diluted in N_{2}) at 280°C. The kinetics of the reaction depends on the type of the substrate. After reaction the superconducting behaviour of the films is improved without degradation of their crystallinity, whatever the nature of the substrate. The stability of the fluorinated films under oxygen or nitrogen gas was studied. All these results will be compared with those previously obtained for fluorination of oxygen deficient YBaCuO ceramics.

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1 Acta Physica Polonica A

1 1997

1 Guilloux-Viry M.

1 Massiot P.

1 Perrin A.

1 Perrin C.

1 Sergent M.

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Fluorination Under NF_{3} Flow of Oxygen Deficient YBa_{2}Cu_{3}O_{x} Thin Films Deposited on Various Types of Substrate