Reactive magnetron sputtering of austenitic stainless steel in nitrogen containing atmosphere was used to deposit coatings composed of S-phase. The process was conducted at constant temperature (200°C). The influence of total and partial nitrogen pressure on coating characteristics was investigated. It was observed that both total and nitrogen partial pressures have influence on coating composition and microstructure. Increasing nitrogen content in the S-phase coating can have a beneficial effect on its corrosion characteristics. It was also found that coatings deposited in the ambient of high nitrogen contents are composed of S-phase and the additional high-nitrogen phase, which is of crucial influence on mechanical properties of the coatings. It was also found that partial argon pressure can contribute to the changes in mechanical properties of the coatings.
The paper presents the results of investigations of carbon doped austenitic stainless steel coatings (carbon S-phase) obtained by the reactive magnetron sputtering in the reactive atmosphere composed of argon and methane as a carbon source. Stainless steel targets were sputtered under different conditions. During the experiments the argon to methane proportion varied within a range 11/2-7/6. The other parameters such as temperature, pressure, sputtering power, etc. were kept constant. The phase composition was determined using the X-ray diffraction. Electron probe microanalysis (energy dispersive spectroscopy and wavelength dispersive spectroscopy) and glow discharge optical emission spectrometry techniques were used to study element composition of the coatings. Microstructure was investigated by scanning electron microscopy. It was found that varying the methane volume in the reactive atmosphere, it is possible to control the lattice parameter of the carbon S-phase.
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