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Zr, ZrN and Zr/Al Thin Films Deposition Using Arc Evaporation and Annealing

100%

Čyvienė J., Dudonis J.

Acta Physica Polonica A

2008

vol. 114

issue 4

769-777

The chemical reactions are widely used for the layers of different composition formation. However, synthesis mechanism is a complicated process in thin films/layers system, and is not completely studied. The purpose of this paper was to analyze the kinetics of chemical compounds in reaction, to produce ZrO₂ thin films using arc evaporation and annealing (post-deposition), and to analyze them. The pure zirconium (Zr) and zirconium nitride (ZrN) were deposited using arc evaporation. 10% mol of aluminum was evaporated on a few Zr films. All deposited films were annealed in the air atmosphere gradually changing the temperature from 400°C to 1100°C in order to produce ZrO₂ films. The formation processes of the new phase were studied. Activation energy of the reactions was calculated. Structural properties were measured using X-ray diffraction, optical properties - using ellipsometry. Tetragonal phase of ZrO₂ was obtained in the annealing process of ZrO₂/Al thin film in the air atmosphere of 800°C.

Investigation of Structural and Optical Properties of GDC Thin Films Deposited by Reactive Magnetron Sputtering

81%

Sakaliūnienė J., Čyvienė J., Abakevičienė B., Dudonis J.

Acta Physica Polonica A

2011

vol. 120

issue 1

63-65

The purpose of this paper was to analyze structural and optical properties of gadolinia-doped ceria (GDC, Ce_{0.9}Gd_{0.1}O_{1.95}) thin films. At first the ceria-gadolinia multilayer sandwich systems (4-12 layers) were deposited using reactive magnetron sputtering in the O_2/Ar gas mixtures. The films were formed with ≈ 90% ceria and ≈ 10% gadolinia. The GDC thin films deposited on Si (111) substrate were annealed at 600°C for 1 h in air. The thickness of the formed GDC multilayer systems was about 600 nm. The GDC thin film microstructure was investigated by X-ray diffraction and scanning electron microscopy. The texture coefficient T_{c(hkl)} of GDC films was evaluated from the X-ray diffraction patterns. The crystallite size of GDC films was estimated from the Scherrer equation. Optical properties of the annealed GDC thin films were examined using a laser ellipsometer. The results show that the number of layers has the influence on GDC thin film formation. As follows from the analysis of structural and optical properties of GDC 12 layer system annealed at 600°C for one hour in air has the highest refractive index n = 2.17.

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2 Acta Physica Polonica A

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2 Dudonis J.

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Zr, ZrN and Zr/Al Thin Films Deposition Using Arc Evaporation and Annealing

Investigation of Structural and Optical Properties of GDC Thin Films Deposited by Reactive Magnetron Sputtering