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Electroless selective deposition of gold nano-array for silicon nanowires growth

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Ruiz-Gomes E., Herrier C., Gouyé A., Benkouider A., Sudraud P., Delobbe A., Ronda A., Berbezier I.
Nanofabrication
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2014
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vol. 1
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issue 1
EN
Nanopatterns of gold clusters on a large surface of oriented Si(111) substrates, from the galvanic displacement of gold salt (via the spontaneous reduction of AuCl4 -), are demonstrated in this work. The Si substrate is patterned by Focused Ion Beam (FIB) prior to being dipped in a gold solution. Here, we show that these patterns lead to successful control of the position and size of gold clusters. Sequential patterning reveals a powerful maskless alternative to surface preparation prior to Si nanowire growth
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