Well-controlled method of Si nanopattern definition - pattern definition by edge oxidation have been presented. The technique is suitable for fabrication of narrow paths of width ranged from several tens of nm to several μm by means of photolithography equipment working with μm-scale design rules. Process details influencing a shape of the Si pattern have been discussed. SEM examinations have been presented.
We investigated three lunar regolith powder samples from the Apollo missions. Apollo 11 and Apollo 12 samples come from lunar maria and Apollo 16 sample from a highland region. In the present paper we summarise in brief results of measurements using photoelectron spectroscopy (XPS), micro-Raman spectroscopy (RM), x-ray diffraction (XRD), x-ray fluorescence spectroscopy (XRF), temperature programmed reduction and oxidation (TPRO), thermogravimetry (TG), differential thermal analysis (DTA) and nitrogen adsorption. Parts of samples are visualised by means of scanning electron microscopy (SEM/EDX) and atomic force microscopy (AFM).
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