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EN
A metal/insulator/metal (MIM) diode is a structure in which a thin oxide layer is sandwiched between two metal layers. Metal/insulator/metal (MIM) diodes coupled to antennas have been widely investigated as detectors for millimeter wave and infrared radiation for imaging and spectroscopic applications. In this work, we report on the fabrication and characterization of MIM tunnel junction diodes by using a new material combination, vanadium-vanadium pentoxide-vanadium (V/V₂O₅/V), with contact areas of 2× 2 μm². The V/V₂O₅/V MIM was fabricated using electron-beam lithography, sputter deposition and conventional liftoff methods. The fabricated V/V₂O₅/V MIM diodes showed a maximum absolute sensitivity of 2.35 V^{-1}. In addition, noise spectra for the fabricated MIM diodes were measured and analyzed.
EN
In this paper, we report on the observation of a gyroscope response in the absence of drive oscillator circuitry in a single ended quartz piezoelectric tuning fork. The tuning fork gyroscope was fabricated by conventional photolithography and wet etching techniques. The tuning fork length is 4 mm and the stem length is 2 mm; the tuning fork width and thickness are 0.4 mm and 0.35 mm, respectively. The measured gyroscope sensitivity and signal to noise ratio were 0.22 mV/°/s and 40, respectively, at a rotational rate of 60 °/s.
EN
Microbolometers are the most widely used detectors in long-wave infrared uncooled thermal imagers. An optical cavity is required within a microbolometer structure to increase its optical absorption. In this work we present a detailed study on the design and optimization of a microbolometer optical cavity using Essential-Macleod package. In the simulations, the cavity is considered as thin film multi-layers that form cascaded Fabry-Perot optical cavities. In the design phase, the structures of layers are selected, which includes selection of materials and initial thickness. The absorbing layers are chosen to be made of vanadium-pentoxide (V₂O₅) and titanium (Ti). In the optimization phase, the designed layer thicknesses are varied to maximize optical absorption within the absorbing layers. The simulations show that Ti layer absorption dominates over the V₂O₅ layer. Also, the optimization proves that the thickness of cavity's air-gap is not equal simply to quarter-wavelength, because of the presence of a complex cascaded Fabry-Perot structure. The optimized air-gap thickness is found to be ≈ 3.5 μm at wavelength of 10.6 μm.
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