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Number of results

Journal

2011 | 9 | 2 | 300-306

Article title

Topography and nanomechanical properties of Pd-C films

Content

Title variants

Languages of publication

EN

Abstracts

EN
Atomic force microscopy (AFM) topographical studies and results of nanoindentation experiment for several palladium-carbon films (Pd-C film) deposited on various substrates and with varying palladium content are presented. Pd-C films were prepared by a physical vapor decomposition (PVD) process and next were modified by a chemical vapor decomposition (CVD) method to obtain carbonaceous porous structure with dispersed palladium nanograins and a variation in roughness.The dependence of film topography on the kind of substrate such as Al2O3, Mo polycrystalline foil and fused silica was studied by AFM. Nanomechanical properties such as hardness and the reduced indentation modulus were determined by nanoindentation. A comparison of these values for films with different Pd content deposited on various substrates is presented.

Publisher

Journal

Year

Volume

9

Issue

2

Pages

300-306

Physical description

Dates

published
1 - 4 - 2011
online
20 - 2 - 2011

Contributors

  • Tele & Radio Research Institute, Ratuszowa 11, 03-450, Warsaw, Poland
  • Tele & Radio Research Institute, Ratuszowa 11, 03-450, Warsaw, Poland
author
  • Dept. of Engineering Physics, Univ. of Applied Sciences Wildau, Bahnhofstrasse 1, 15745, Wildau, Germany

References

  • [1] X.M.H. Huang, M. Manolidis, Seong Chan Jun, J. Hone, Appl. Phys. Lett. 86, 143104 (2005) http://dx.doi.org/10.1063/1.1897445[Crossref]
  • [2] S.E. Lyshevski, Nano- and micro-electromechanical systems: fundamentals of nano- and micro engineering (CRC Press, Boca Raton, FL, 2005)
  • [3] R. Duś, E. Nowicka, R. Nowakowski, Acta Phys. Pol. A 114, 29 (2008)
  • [4] G. Timp, Nanotechnology (Springer, New York, 1999) http://dx.doi.org/10.1007/978-1-4612-0531-9[Crossref]
  • [5] A.C. Fischer-Cripps, Nanoindentation (Springer-Verlag, New York, 2002)
  • [6] E. Czerwosz et al., Vacuum 82, 372 (2008) http://dx.doi.org/10.1016/j.vacuum.2007.08.003[Crossref]
  • [7] M. Kozłowski et al., Journal of Achievements in Materials and Manufacturing Engineering 37, 304 (2009)
  • [8] W.C. Oliver, G.M. Pharr, J. Mater. Res. 7, 1564 (1992) http://dx.doi.org/10.1557/JMR.1992.1564[Crossref]
  • [9] B. Wolf, A. Richter, New Journal of Physics 5, 15.1 (2003) http://dx.doi.org/10.1088/1367-2630/5/1/315[Crossref]
  • [10] A. Richter, R. Ries, R. Smith, M. Henkel, B. Wolf, Diam. Relat. Mater. 9, 170 (2000) http://dx.doi.org/10.1016/S0925-9635(00)00188-6[Crossref]

Document Type

Publication order reference

Identifiers

YADDA identifier

bwmeta1.element.-psjd-doi-10_2478_s11534-010-0134-5
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