Optical and microstructural properties of self-assembled InAs quantum structures in silicon

• Authors: Sławomir Prucnal , Marcin Turek , Andrzej Drozdziel , Krzysztof Pyszniak , Artur Wójtowicz , Sheng-Qiang Zhou , Alohe Kanjilal , Artem Shalimov , Wolfgang Skorupa , Jerzy Zuk
• Languages of publication: EN

Abstracts

EN

The InAs quantum structures were formed in silicon by sequential ion implantation and subsequent thermal annealing. Two kinds of crystalline InAs nanostructures were successfully synthesized: nanodots (NDs) and nanopyramids (NPs). The peaks at 215 and 235 cm−1, corresponding to the transverse optical (TO) and longitudinal optical (LO) InAs single-phonon modes, respectively, are clearly visible in the Raman spectra. Moreover, the PL band at around 1.3 µm, due to light emission from InAs NDs with an average diameter 7±2 nm, was observed. The InAs NPs were found only in samples annealed for 20 ms at temperatures ranging from 1000 up to 1200°C. The crystallinity and pyramidal shape of InAs quantum structures were confirmed by HRTEM and XRD techniques. The average size of the NPs is 50 nm base and 50 nm height, and they are oriented parallel to the Si (001) planes. The lattice parameter of the NPs increases from 6.051 to 6.055 Å with the annealing temperature increasing from 1100 to 1200°C, due to lattice relaxation. Energy dispersive spectroscopy (EDS) shows almost stoichiometric composition of the InAs NPs.

Keywords

EN

InAs; nanodots; nanopyramids; flash lamp annealing; photoluminescence

• Publisher: De Gruyter Open
• Journal: Open Physics
• Year: 2011
• Volume: 9
• Issue: 2
• Pages: 338-343

Dates

published

1 - 4 - 2011

online

20 - 2 - 2011

Contributors

author

Sławomir Prucnal

• Maria Curie-Skłodowska University, Pl. M. Curie-Skłodowskiej 1, 20-031, Lublin, Poland

author

Marcin Turek

• Maria Curie-Skłodowska University, Pl. M. Curie-Skłodowskiej 1, 20-031, Lublin, Poland

author

Andrzej Drozdziel

• Maria Curie-Skłodowska University, Pl. M. Curie-Skłodowskiej 1, 20-031, Lublin, Poland

author

Krzysztof Pyszniak

• Maria Curie-Skłodowska University, Pl. M. Curie-Skłodowskiej 1, 20-031, Lublin, Poland

author

Artur Wójtowicz

• Maria Curie-Skłodowska University, Pl. M. Curie-Skłodowskiej 1, 20-031, Lublin, Poland

author

Sheng-Qiang Zhou

• Institute of Ion Beam Physics and Materials Research, Forschungszentrum Dresden-Rossendorf, P.O. Box 510119, 01314, Dresden, Germany

author

Alohe Kanjilal

• Institute of Ion Beam Physics and Materials Research, Forschungszentrum Dresden-Rossendorf, P.O. Box 510119, 01314, Dresden, Germany

author

Artem Shalimov

• Institute of Ion Beam Physics and Materials Research, Forschungszentrum Dresden-Rossendorf, P.O. Box 510119, 01314, Dresden, Germany

author

Wolfgang Skorupa

• Institute of Ion Beam Physics and Materials Research, Forschungszentrum Dresden-Rossendorf, P.O. Box 510119, 01314, Dresden, Germany

author

Jerzy Zuk

• Maria Curie-Skłodowska University, Pl. M. Curie-Skłodowskiej 1, 20-031, Lublin, Poland

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Identifiers

DOI

10.2478/s11534-010-0107-8