EN
The structure of the surface and spectra of the cathodoluminescence of Y₂O₃:Eu thin films when changing the activator concentration in the range 1.0-7.5% by mole obtained by RF sputtering were investigated. On the base of the shape of the cathodoluminescence spectra at different concentrations of the activator, the possibility of irregular solutions creating of yttrium and europium oxides and the structural features of the small and large crystallites forming the film Y₂O₃:Eu is shown. The dependence of the cathodoluminescence intensity on the energy of the exited electrons and current density of electron irradiation was established.