Acquisition of the Surface Morphology of Ruled Gratings with a Microscope Objective

• Authors: Z. Li , L. Ma , C. Liu , M. Zhang , X. Chen , C. Cheng
• Languages of publication: EN

Abstracts

EN

In this paper, an optical microscope objective with large numerical number is inserted into a Mach-Zehnder interferometer, and this system is adopted to detect the surface morphologies of two ruled transmission gratings with area scale to a micrometer. The object waves transmitting from the gratings interfere with spherical reference wave, and the interferograms constructed are recorded by a high-resolution CCD. The surface maps of the gratings are retrieved from the interferograms, and the results are confirmed by the measurement with an atomic force microscope, with detection errors in nanometer scale. This work provides an optical non-destructive method for precise detection of small-area sophisticated object surfaces with an optical microscope objective.

Keywords

EN

42.30.Kq; 42.87.-d; 42.79.Dj; 42.40.Kw

Discipline

• 42.40.Kw: Holographic interferometry; other holographic techniques(for interferometers, see 07.60.Ly in instruments)
• 42.79.Dj: Gratings(for holographic gratings, see 42.40.Eq)
• 42.87.-d: Optical testing techniques
• 42.30.Kq: Fourier optics

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2015
• Volume: 127
• Issue: 6
• Pages: 1630-1634

Dates

published

2015-06

received

2014-02-27

(unknown)

2015-03-22

Contributors

author

Z. Li

• College of Physics and Electronics, Shandong Normal University, Jinan 250014, China
• College of Physics and Electric Information, Dezhou University, Dezhou 253023, China

author

L. Ma

• College of Physics and Electronics, Shandong Normal University, Jinan 250014, China

author

C. Liu

• College of Physics and Electronics, Shandong Normal University, Jinan 250014, China

author

M. Zhang

• College of Science, Qilu University Of Technology, Jinan 250353, China

author

X. Chen

• School of Physics and Technology, University of Jinan, Jinan 250022, China

author

C. Cheng

• College of Physics and Electronics, Shandong Normal University, Jinan 250014, China

References

• [1] M. Python, E. Vallat-Sauvain, J. Bailat, D. Dominé, L. Fesquet, A. Shah, Ch. Ballif, J. Non-Cryst. Solids 354, 2258 (2008), doi: 10.1016/j.jnoncrysol.2007.09.084
• [2] H. Ohta, K. Nomura, H. Hiramatsu, K. Ueda, T. Kamiya, M. Hirano, H. Hosono, Solid-State Electron. 47, 2261 (2003), doi: 10.1016/S0038-1101(03)00208-9
• [3] Y. Tsuboi, R. Shimizu, T. Shoji, N. Kitamura, J. Am. Chem. Soc. 131, 12623 (2009), doi: 10.1021/ja9016655
• [4] H. Liu, B. Wang, E.S.P. Leong, P. Yang, Y. Zong, G.Y. Si, J.H. Teng, S.A. Maier, ACS Nano 4, 3139 (2010), doi: 10.1021/nn100466p
• [5] S. Sarkar, S. Patra, N. Gayathri, S. Banerjee, Appl. Phys. Lett. 96, 063112 (2010), doi: 10.1063/1.3309690
• [7] F.J. Giessibl, Rev. Mod. Phys. 75, 949 (2003), doi: 10.1103/RevModPhys.75.949
• [8] J.M. Burch, Nature 171, 889 (1953), doi: 10.1038/171889a0
• [9] I.K. Robinson, D.J. Tweet, Rep. Prog. Phys. 55, 599 (1992), doi: 10.1088/0034-4885/55/5/002
• [10] M.K. Kim, L.F. Yu, C.M. Lo, C.J. Mann, Opt. Expr. 13, 8693 (2005), doi: 10.1364/OPEX.13.008693
• [11] E. Cuche, F. Bevilacqua, C. Depeursinge, Opt. Lett. 24, 291 (1999), doi: 10.1364/OL.24.000291
• [12] T. Weitkamp, A. Diaz, C. David, F. Pfeiffer, M. Stampanoni, P. Cloetens, E. Ziegler, Opt. Expr. 13, 6296 (2005), doi: 10.1364/OPEX.13.006296
• [13] J.M. Huntley, H. Saldner, Appl. Opt. 32, 3047 (1993), doi: 10.1364/AO.32.003047

Identifiers

DOI

10.12693/APhysPolA.127.1630