Noise Effect on Thin Film Characterization Using Rotating Polarizer Analyzer Ellipsometer

• Authors: T. El-Agez , S. Taya
• Languages of publication: EN

Abstracts

EN

We present theoretically the characterization of 100 nm SiO_2 thin film using spectroscopic rotating polarizer analyzer ellipsometer in which the two elements are rotating synchronously in opposite directions with the same angular speed. The proposed sample consists of air (ambient)/SiO_2 (thin film)/Si (substrate). The ellipsometric parameters ψ and Δ are calculated when a clean signal is received by the detector and when a hypothetical noise is imposed on this signal. The film thickness and the optical constants of the film are calculated for the noisy signal in the spectrum range 200-800 nm. The results are compared with the proposed thickness and with the published values for SiO_2 optical constants.

Keywords

EN

07.60.Fs; 78.66.Bz; 78.20.Ci

Discipline

• 78.20.Ci: Optical constants (including refractive index, complex dielectric constant, absorption, reflection and transmission coefficients, emissivity)
• 78.66.Bz: Metals and metallic alloys
• 07.60.Fs: Polarimeters and ellipsometers

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2012
• Volume: 122
• Issue: 1
• Pages: 15-19

Dates

published

2012-07

received

2010-12-21

(unknown)

2012-02-22

Contributors

author

T. El-Agez

• Physics Department, Islamic University of Gaza, P.O. Box 108, Gaza, Palestinian Authority

author

S. Taya

• Physics Department, Islamic University of Gaza, P.O. Box 108, Gaza, Palestinian Authority

References

• 1. R.M. Azzam, N.M. Bashara, Ellipsometry and Polarized Light, North-Holland, Amsterdam 1977
• 2. P.S. Hauge, Surf. Sci. 96, 108 (1980)
• 3. J.A. Woollam, P.G. Snyder, M.C. Rost, Thin Solid Films 166, 317 (1988)
• 4. K. Vedam, Thin Solid Films 313, 1 (1998)
• 5. D.E. Aspnes, Thin Solid Films 455, 3 (2004)
• 6. D.E. Aspnes, Opt. Commun. 8, 222 (1973)
• 7. D.E. Aspnes, Appl. Opt. 4, 220 (1975)
• 8. A.R. Zaghloul, R.M. Azzam, Surf. Sci. 96, 168 (1980)
• 9. L. Vina, C. Umbatch, M. Cardona, L. Vodopyanov, Phys. Rev. B 29, 6752 (1984)
• 10. L.Y. Chen, D.W. Lynch, Appl. Opt. 26, 5221 (1987)
• 11. L.Y. Chen, X.W. Feng, Y. Su, H.Z. Ma, Y.H. Qian, Thin Solid Films 234, 385 (1993)
• 12. L.Y. Chen, X.W. Feng, Y. Su, H.Z. Ma, Y.H. Qian, Appl. Opt. 33, 1299 (1994)
• 13. C. Wijers, Appl. Phys. B 27, 5 (1982)
• 14. R.M. Azzam, Opt. Commun. 25, 137 (1978)
• 15. T.M. El-Agez, A.A. El Tayyan, S.A. Taya, Thin Solid Films 518, 5610 (2010)
• 16. E.D. Palik, Handbook of Optical Constants of Solids, Academic Press, San Diego, CA 1985
• 17. S. Samuel, Surf. Sci. 56, 97 (1976)

Identifiers

DOI

10.12693/APhysPolA.122.15