Influence of Substrate Local Heating on Morphology of~Al and Al_2O_3 Nanofilms

• Authors: K. Reszka , M. Szczypiński , M. Pomorska
• Languages of publication: EN

Abstracts

EN

Experimental investigations presented in this work were focused on the execution of a carousel system with its usability for step-by-step revolutions and the mechanism for clamping the heater, which made it possible to heat substrates individually within the range from 25°C to 300°C. This system was used for depositing the metallic Al films by the magnetron sputtering method on foil made of FeCrAl steel, which found application in the production of metallic catalytic reactors. It was found that in the case of not-heated foil the polycrystalline continuous Al film, which is separated from steel by an amorphous oxide nanofilm obtained spontaneously under influence of weather conditions, was created. The deposition of aluminium on foil heated to the temperature of 300°C caused the film marked by fine grains integrated with small forces to be formed. These differences had an influence on the morphology of the oxide films.

Keywords

EN

68.55.jm; 68.55.J-

Discipline

• 68.55.jm: Texture
• 68.55.J-: Morphology of films

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2011
• Volume: 120
• Issue: 1
• Pages: 177-180

Dates

published

2011-07

Contributors

author

K. Reszka

• Institute of Mechatronics, Nanotechnology and Vacuum Technique, Koszalin University of Technology, Śniadeckich 2, 75-435 Koszalin, Poland

author

M. Szczypiński

• Termex Ltd., Lniana 9, 75-213 Koszalin, Poland

author

M. Pomorska

• Institute of Metallurgy and Materials Science, PAS, Reymonta 25, 30-059 Kraków, Poland

References

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Identifiers

DOI

10.12693/APhysPolA.120.177