The Influence of Reactive Gaseous Flow Rate and Composition on the Optical Properties of TiO_2 Thin Films Deposited by Dc Magnetron

• Authors: M. Stamate , G. Lazar , V. Nedeff , I. Lazar , I. Caraman , I. Rusu , D. Rusu
• Languages of publication: EN

Abstracts

EN

In the paper there are shown the changes in optical properties of TiO_2 thin films prepared by dc magnetron sputtering at different gas flow rates. We found that there is a drastic change in optical properties such as optical transmission, refractive index, extinction coefficient and optical band gap with the gaseous flow rate and composition. We observed an improvement in optical properties of the films that had been deposited at higher gaseous flow rate and at a certain gaseous composition.

Keywords

EN

81.15.Cd; 81.40.Tv

Discipline

• 81.15.Cd: Deposition by sputtering
• 81.40.Tv: Optical and dielectric properties related to treatment conditions

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 2009
• Volume: 115
• Issue: 3
• Pages: 755-757

Dates

published

2009-03

received

2007-11-02

(unknown)

2008-02-20

Contributors

author

M. Stamate

• Physics Engineering and Environmental Engineering Dept., Bacau University Calea, Marasesti no. 157, Bacau, RO-600115, Romania

author

G. Lazar

• Physics Engineering and Environmental Engineering Dept., Bacau University Calea, Marasesti no. 157, Bacau, RO-600115, Romania

author

V. Nedeff

• Physics Engineering and Environmental Engineering Dept., Bacau University Calea, Marasesti no. 157, Bacau, RO-600115, Romania

author

I. Lazar

• Physics Engineering and Environmental Engineering Dept., Bacau University Calea, Marasesti no. 157, Bacau, RO-600115, Romania

author

I. Caraman

• Physics Engineering and Environmental Engineering Dept., Bacau University Calea, Marasesti no. 157, Bacau, RO-600115, Romania

author

I. Rusu

• Physics Engineering and Environmental Engineering Dept., Bacau University Calea, Marasesti no. 157, Bacau, RO-600115, Romania

author

D. Rusu

• Physics Engineering and Environmental Engineering Dept., Bacau University Calea, Marasesti no. 157, Bacau, RO-600115, Romania

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Identifiers

DOI

10.12693/APhysPolA.115.755