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Number of results
2005 | 107 | 4 | 702-711

Article title

Porosity of Low-κ Materials Studied by Slow Positron Beam

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Abstracts

EN
The information about porosity in low-κ materials obtainable by depth profiling with positron annihilation spectroscopy is reviewed. In particular we focus on Doppler broadening spectroscopy and 2-3γ ratio of positronium measurements on SiOCH and amorphous carbon a-C:F:H thin films produced by plasma enhanced chemical vapour deposition.

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Contributors

author
  • Dipartimento di Fisica, Università di Trento, 38050 Povo (Tn), Italy
author
  • Dipartimento di Fisica, Università di Trento, 38050 Povo (Tn), Italy
author
  • Dipartimento di Fisica, Università di Trento, 38050 Povo (Tn), Italy
author
  • Dipartimento di Fisica, Università di Trento, 38050 Povo (Tn), Italy

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Document Type

Publication order reference

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bwmeta1.element.bwnjournal-article-appv107n422kz
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