In Situ Monitoring of Electroepitaxial Growth of Thick AlGaAs Layers

• Authors: Z. Żytkiewicz
• Languages of publication: EN

Abstracts

EN

In situ growth monitoring technique has been used to analyse growth disturbances during the liquid phase electroepitaxial growth of thick AlGaAs layers. It allowed us to explain the nature of growth instability occurring at the end of the growth and affecting the maximum thickness of AlGaAs layers obtainable by liquid phase electroepitaxy.

Keywords

EN

68.55.Df; 81.10.Dn

Discipline

• 81.10.Dn: Growth from solutions

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 1993
• Volume: 84
• Issue: 4
• Pages: 777-780

Dates

published

1993-10

Contributors

author

Z. Żytkiewicz

• Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, 02-668 Warszawa, Poland

Identifiers

DOI

10.12693/APhysPolA.84.777