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1993 | 84 | 4 | 713-716

Article title

Photoluminescence Properties of Porous Silicon Prepared by Electrochemical Etching of Si Epitaxial Layer

Content

Title variants

Languages of publication

EN

Abstracts

EN
The photoluminescence properties of porous layers prepared by anodization of p/p^{+} silicon epitaxial wafers are presented. The shift of the photoluminescence spectrum towards shorter wavelength due to the porosity increase and the experimental dependence of the photoluminescence maximum position on HF concentration during anodization are shown. Degradation of the photoluminescence intensity dependence on the storage time is described.

Keywords

EN

Year

Volume

84

Issue

4

Pages

713-716

Physical description

Dates

published
1993-10

Contributors

  • Institute of Electronic Materials Technology, Wólczyńska 133, 01-919 Warszawa, Poland
author
  • Institute of Electronic Materials Technology, Wólczyńska 133, 01-919 Warszawa, Poland

References

Document Type

Publication order reference

Identifiers

YADDA identifier

bwmeta1.element.bwnjournal-article-appv84z425kz
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