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PN-ISO 690:2012
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Journal
Acta Physica Polonica A
1991
|
80
|
3
| 457-460
Article title
Direct Measurements of Arsenic and Phosphorus Evolution During Cap-Annealing of Gold-Based Metallizations on GaAs and InP
Authors
A. Piotrowska
,
E. Kamińska
,
M. Guziewicz
,
R. Veresegyhazy
,
I. Mojzes
,
B. Pecz
Content
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Languages of publication
EN
Abstracts
EN
Evolution of arsenic and phosphorus during heat treatment of unprotected and encapsulated Au, AuZn and AuGeNi contacts on GaAs and InP has been examined and correlated with their ohmic behavior.
Keywords
EN
73.40.Ns
Discipline
73.40.Ns: Metal-nonmetal contacts
Publisher
Institute of Physics, Polish Academy of Sciences
Journal
Acta Physica Polonica A
Year
1991
Volume
80
Issue
3
Pages
457-460
Physical description
Dates
published
1991-09
Contributors
author
A. Piotrowska
Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland
author
E. Kamińska
Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland
author
M. Guziewicz
Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland
author
R. Veresegyhazy
Research Institute for Technical Physics, Hungarian Academy of Sciences, 1325 Budapest, P.O. Box 76, Hungary
author
I. Mojzes
Research Institute for Technical Physics, Hungarian Academy of Sciences, 1325 Budapest, P.O. Box 76, Hungary
author
B. Pecz
Research Institute for Technical Physics, Hungarian Academy of Sciences, 1325 Budapest, P.O. Box 76, Hungary
References
Document Type
Publication order reference
Identifiers
DOI
10.12693/APhysPolA.80.457
YADDA identifier
bwmeta1.element.bwnjournal-article-appv80z337kz
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