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2018 | 108 | 99-110
Article title

Atomic layer deposition as a tool of Surface engineering

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EN
Abstracts
EN
The applications of nanostructured materials are close related to their shape and properties. A comprehensive understanding of the properties modification by controlling the material size, thickness or shape is of key importance. A nanostructure can become a building block to create the upcoming nano-technological stages, where the final characteristics of devices can be fine-tuned from design. In this report it is shown that several physicochemical properties, such as refractive index, band gap or thermal resistance can be modified in a controlled fashion. ALD is a very versatile fabrication technique for building nanotubes (Al2O3 and TiO2), nanolaminates (Al2O3-ZnO, Y2O3-ZrO2 and ZrO2-TiO2) and core-shell materials (diamond-Al2O3) with an exquisite precision on the thickness of the coatings.
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Year
Volume
108
Pages
99-110
Physical description
Contributors
author
  • Centro de Nanociencias y Nanotecnología. Universidad Nacional Autónoma de México, Km 107 Carretera Tijuana-Ensenada s/n, Ensenada, B.C., C.P. 22800, México
author
  • Centro de Nanociencias y Nanotecnología. Universidad Nacional Autónoma de México, Km 107 Carretera Tijuana-Ensenada s/n, Ensenada, B.C., C.P. 22800, México
  • CONACyT- Centro de Nanociencias y Nanotecnología. Universidad Nacional Autónoma de México, Km 107 Carretera Tijuana-Ensenada s/n, Ensenada, B.C., C.P. 22800, México
author
  • CONACyT- Centro de Nanociencias y Nanotecnología. Universidad Nacional Autónoma de México, Km 107 Carretera Tijuana-Ensenada s/n, Ensenada, B.C., C.P. 22800, México
author
  • Centro de Nanociencias y Nanotecnología. Universidad Nacional Autónoma de México, Km 107 Carretera Tijuana-Ensenada s/n, Ensenada, B.C., C.P. 22800, MéxicoCentro de Nanociencias y Nanotecnología. Universidad Nacional Autónoma de México, Km 107 Carretera Tijuana-Ensenada s/n, Ensenada, B.C., C.P. 22800, México
  • Centro de Nanociencias y Nanotecnología. Universidad Nacional Autónoma de México, Km 107 Carretera Tijuana-Ensenada s/n, Ensenada, B.C., C.P. 22800, México
  • Centro de Nanociencias y Nanotecnología. Universidad Nacional Autónoma de México, Km 107 Carretera Tijuana-Ensenada s/n, Ensenada, B.C., C.P. 22800, México
author
  • Centro de Nanociencias y Nanotecnología. Universidad Nacional Autónoma de México, Km 107 Carretera Tijuana-Ensenada s/n, Ensenada, B.C., C.P. 22800, México
References
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Document Type
article
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YADDA identifier
bwmeta1.element.psjd-f6beb17d-c04a-40ee-aecf-4f4f0ff66f11
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