The influence of deposition conditions on structure of PVD coatings obtained in the magnetron process
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This paper presents the influence of deposition conditions on texture and stress results of TiN coatings deposited by using the PVD magnetron process. Modification of parameters was related to the changes of temperature and substrate potential. The article presents the results of an analysis of texture and stress measurement obtained by X-ray methods and the results of microhardness measurement.
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