Resonance phenomena in micro/nanoelectromechanical systems
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In the paper, some aspects of nonlinearity of micro/nanoelectromechanical systems (MEMS/ NEMS) are presented. Because of great values of strains of micro/nanobeams the nonlinear description is necessary. Particularly, the nonlinear inertia term is added to equation relating to motion of the beam. Numerical calculations of resonance curves and instability regions are given. Results are presented on graphs.
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