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Number of results
2020 |

Article title

A low-cost, simple optical setup for a fast scatterometry surface roughness measurements with nanometric precision

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PL
A low-cost, simple optical setup for a fast scatterometry surface roughness measurements with nanometric precision

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EN

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Publication order reference

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YADDA identifier

bwmeta1.element.oai-journals-pan-pl-116520
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