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Journal
Bulletin of the Polish Academy of Sciences: Technical Sciences
2020
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Article title
A low-cost, simple optical setup for a fast scatterometry surface roughness measurements with nanometric precision
Authors
D. Kucharski
,
H. Zdunek
,
D. Kucharski
,
H. Zdunek
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Title variants
PL
A low-cost, simple optical setup for a fast scatterometry surface roughness measurements with nanometric precision
Languages of publication
EN
Abstracts
Keywords
EN
scatterometry
surface texture
optical measurement systems
surface metrology
surface roughness
PL
Nauki Techniczne
Publisher
Polska Akademia Nauk
Journal
Bulletin of the Polish Academy of Sciences: Technical Sciences
Year
2020
Physical description
Contributors
author
D. Kucharski
author
H. Zdunek
author
D. Kucharski
author
H. Zdunek
References
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.oai-journals-pan-pl-116520
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