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Number of results
2001 | 99 | 3-4 | 435-440
Article title

Characterization of Sn Films on Silicon by Slow Positron Implantation Spectroscopy

Content
Title variants
Languages of publication
EN
Abstracts
EN
Sn films grown on silicon substrate by d.c. magnetron sputtering have been investigated by slow positron implantation spectroscopy. As the substrate bias is one of the most important factors affecting the structure of a sputtered film, films grown at various substrate bias (+80 V, 0 V, -80 V) are compared and their properties are discussed.
Keywords
EN
Publisher

Year
Volume
99
Issue
3-4
Pages
435-440
Physical description
Dates
published
2001-03/04
received
2000-09-18
Contributors
author
  • Department of Physics, University of Rousse, 7017 Rousse, Bulgaria
author
  • Department of Physics, University of Rousse, 7017 Rousse, Bulgaria
author
  • Institut für Ionenstrahlphysik und Materialforschung, Forschungszentrum Rossendorf, Postfach 51 01 19, 01314 Dresden, Germany
author
  • Institut für Ionenstrahlphysik und Materialforschung, Forschungszentrum Rossendorf, Postfach 51 01 19, 01314 Dresden, Germany
References
  • 1. Huai-Wu Zhang, You-gang Zhang, Wu-yi Xu, Vacuum, 45, 145, 1994
  • 2. Huai-Wu Zhang , S.Q. Yang, Vacuum, 46, 666, 1995
  • 3. F. Arefi-Khonsari, F. Hellegouarc'h, J. Amouroux, J. Vac. Sci. Technol. A, 16, 2240, 1998
  • 4. P. Patsalas, C. Charitidis, S. Logothetidis, Surf. Coat. Technol., 125, 335, 2000
  • 5. N. Nancheva, P. Docheva, M. Misheva, N. Djourelov, Bulgarian J. Phys., 25, 171, 1998
  • 6. N. Nancheva, P. Docheva, W. Anwand, G. Brauer, P.G. Coleman, Acta Phys. Pol. A, 95, 623, 1999
  • 7. Z.W. Yang, S.H. Han, T.L. Yang, Lina Ye, D.H. Zhang, H.L. Ma, C.F. Cheng, Thin Solid Films, 366, 4, 2000
  • 8. A. van Veen, H. Schut, J. de Vries, R.A. Hakvoort, M.R. Ijpma, in: Positron Beams for Solids and Surfaces, Eds. P.J. Schultz, G.R. Massoumi, P.J. Simpson, American Institute of Physics, New York 1990, p. 171
  • 9. W. Fuhs, U. Holzhauer, S. Mantl, F.W. Richter, R. Sturm, Phys. Status Solidi B, 89, 69, 1978
  • 10. S. Berg, C. Nender, B. Gelin, J. Vac. Sci. Technol. A, 4, 448, 1986
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv99n319kz
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