EN
High quality YBa_{2}Cu_{3}O_{7} thin films on areas of up to 9" in diameter have been grown by reactive thermal co-evaporation using a rotating substrate holder. A scanning inductive j_{c} probe is used to monitor the homogeneity of critical current densities which are typically greater than 2 MA/cm^{2}. The same technique also allows a double sided deposition for filter applications. Surface resistance values are found to be below 500 μΩ at 10 GHz. On biaxially aligned buffer layers on polycrystalline substrates j_{c} values of 1.4 MA/cm^{2} are achieved at 77 K as well. We have also studied the properties of Nd_{1-x}Ba_{2+x}Cu_{3}O_{7} films grown with the same system.