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Number of results
1997 | 91 | 5 | 981-985

Article title

X-Ray Structure Perfection Diagnostics of Slightly Distorted Silicon Crystals in the Bragg Case of Diffraction

Content

Title variants

Languages of publication

EN

Abstracts

EN
A new approach to structure perfection diagnostics of dislocation-free silicon crystals has been developed using the Bragg case of diffraction. The approach is being based on successive measurements of integral reflectivity and the spatial intensity distribution of reflected beam on the same diffraction planes of a real crystal by means of a single crystal diffractometer.

Keywords

EN

Year

Volume

91

Issue

5

Pages

981-985

Physical description

Dates

published
1997-05

Contributors

author
  • Department of Physics, Science Laboratories, University of Durham, South Road, Durham, DH1 3LE, U.K.
author
  • Institute of Semiconductor Physics of the National Academy of Sciences, Kiev, Ukraine
author
  • Institute of Semiconductor Physics of the National Academy of Sciences, Kiev, Ukraine
author
  • Institute of Semiconductor Physics of the National Academy of Sciences, Kiev, Ukraine
author
  • Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, 02-668 Warsaw, Poland

References

Document Type

Publication order reference

Identifiers

YADDA identifier

bwmeta1.element.bwnjournal-article-appv91z524kz
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