Soft X-Ray Spectromicroscopy and its Application to Semiconductor Microstructure Characterization

• Authors: F. Gozzo , K. Franck , M.R. Howells , Z. Hussain , A. Warwick , H.A. Padmore , B.B. Triplett
• Languages of publication: EN

Abstracts

EN

The universal trend towards device miniaturization has driven the semiconductor industry to develop sophisticated and complex instrumentation for the characterization of microstructures. Many significant problems of relevance to the semiconductor industry cannot be solved with conventional analysis techniques, but can be addressed with soft X-ray spectromicroscopy. An active spectromicroscopy program is being developed at the Advanced Light Source, attracting both the semiconductor industry and the materials science academic community. Examples of spectromicroscopy techniques are presented. An Advanced Light Source μ-XPS spectromicroscopy project is discussed, involving the first microscope completely dedicated and designed for microstructure analysis on patterned silicon wafers.

Keywords

EN

61.16.-d; 85.40.-e; 79.60.-i

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 1997
• Volume: 91
• Issue: 4
• Pages: 697-705

Dates

published

1997-04

Contributors

author

F. Gozzo

• Advanced Light Source, Lawrence Berkeley National Laboratory, 1 Cyclotron Rd., Berkeley, CA 94720, USA

author

K. Franck

• Advanced Light Source, Lawrence Berkeley National Laboratory, 1 Cyclotron Rd., Berkeley, CA 94720, USA

author

M.R. Howells

• Advanced Light Source, Lawrence Berkeley National Laboratory, 1 Cyclotron Rd., Berkeley, CA 94720, USA

author

Z. Hussain

• Advanced Light Source, Lawrence Berkeley National Laboratory, 1 Cyclotron Rd., Berkeley, CA 94720, USA

author

A. Warwick

• Advanced Light Source, Lawrence Berkeley National Laboratory, 1 Cyclotron Rd., Berkeley, CA 94720, USA

author

H.A. Padmore

• Advanced Light Source, Lawrence Berkeley National Laboratory, 1 Cyclotron Rd., Berkeley, CA 94720, USA

author

B.B. Triplett

• Intel Corporation, 3065 Bowers Ave., Santa Clara, CA 95052, USA