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1996 | 90 | 5 | 1045-1049
Article title

Optical Study of MBE Grown Undoped Si-Si_{1-x}Ge_{x}/Si Superlattices

Content
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Languages of publication
EN
Abstracts
EN
Raman spectroscopy and spectroscopic ellipsometry have been used to characterize Si/Si_{0.78}Ge_{0.22} superlattices grown by molecular beam epitaxy on (001)Si at different substrate temperatures. The results are interpreted to give information on material and interface quality, layer thicknesses, and state of strain. The observed frequencies of zone-folded longitudinal acoustic phonons in a high quality sample agree well with those calculated using Rytov's theory of acoustic vibrations in layered media.
Keywords
EN
Year
Volume
90
Issue
5
Pages
1045-1049
Physical description
Dates
published
1996-11
References
Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv90z544kz
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