Materials Technology for GaSb-Based optoelectronic Devices

• Authors: A. Piotrowska , E. Kamińska , T. Piotrowski , M. Piskorski , M. Guziewicz , E. Papis , K. Gołaszewska-Malec , S. Kasjuniuk
• Languages of publication: EN

Abstracts

EN

A study is made of surface preparation, metallization, patterning and dielectric deposition with the aim of developing process technology for GaSb-based photonic devices.

Keywords

EN

73.40.Ns; 81.05.Ea; 81.40.-z

Discipline

• 81.40.-z: Treatment of materials and its effects on microstructure, nanostructure, and properties
• 73.40.Ns: Metal-nonmetal contacts
• 81.05.Ea: III-V semiconductors

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 1996
• Volume: 90
• Issue: 5
• Pages: 903-906

Dates

published

1996-11

Contributors

author

A. Piotrowska

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

E. Kamińska

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

T. Piotrowski

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

M. Piskorski

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

M. Guziewicz

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

E. Papis

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

K. Gołaszewska-Malec

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

S. Kasjuniuk

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

Identifiers

DOI

10.12693/APhysPolA.90.903