Interaction of Au with GaSb and its Impact on the Formation of Ohmic Contacts

• Authors: A. Piotrowska , E. Kamińska , T. Piotrowski , S. Kasjaniuk , M. Guziewicz , S. Gierlotka , X.W. Lin , Z. Liliental-Weber , J. Washburn , S. Kwiatkowski
• Languages of publication: EN

Abstracts

EN

Interfacial reactions between GaSb and Au were studied by Rutherford backscattering, X-ray diffraction, and cross-sectional transmission electron microscopy. Evaluation of the extent to which the GaSb substrate decom­poses was of primary concern. The results give evidence that the reaction takes place even at temperatures as low as 180°C. High reactivity of gold towards GaSb revealed by this study demonstrates that Au-based metalliza­tion is not a good candidate for device quality ohmic contacts to GaSb-based devices.

Keywords

EN

73.40.Ns

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 1995
• Volume: 87
• Issue: 2
• Pages: 419-422

Dates

published

1995-02

Contributors

author

A. Piotrowska

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

E. Kamińska

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

T. Piotrowski

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

S. Kasjaniuk

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

M. Guziewicz

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

S. Gierlotka

• Unipress, Polish Academy of Sciences, Sokołowska 29, 01-142 Warszawa, Poland

author

X.W. Lin

• Materials Science Division, Lawrence Berkeley Laboratory, University of California, Berkeley, CA 94720, USA

author

Z. Liliental-Weber

• Materials Science Division, Lawrence Berkeley Laboratory, University of California, Berkeley, CA 94720, USA

author

J. Washburn

• Materials Science Division, Lawrence Berkeley Laboratory, University of California, Berkeley, CA 94720, USA

author

S. Kwiatkowski

• A. Soltan Institute For Nuclear Studies, Hoża 69, 00-681 Warszawa, Poland