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1995 | 87 | 2 | 419-422
Article title

Interaction of Au with GaSb and its Impact on the Formation of Ohmic Contacts

Content
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Languages of publication
EN
Abstracts
EN
Interfacial reactions between GaSb and Au were studied by Rutherford backscattering, X-ray diffraction, and cross-sectional transmission electron microscopy. Evaluation of the extent to which the GaSb substrate decom­poses was of primary concern. The results give evidence that the reaction takes place even at temperatures as low as 180°C. High reactivity of gold towards GaSb revealed by this study demonstrates that Au-based metalliza­tion is not a good candidate for device quality ohmic contacts to GaSb-based devices.
Keywords
EN
Publisher

Year
Volume
87
Issue
2
Pages
419-422
Physical description
Dates
published
1995-02
Contributors
author
  • Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland
author
  • Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland
author
  • Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland
author
  • Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland
author
  • Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland
author
  • Unipress, Polish Academy of Sciences, Sokołowska 29, 01-142 Warszawa, Poland
author
  • Materials Science Division, Lawrence Berkeley Laboratory, University of California, Berkeley, CA 94720, USA
  • Materials Science Division, Lawrence Berkeley Laboratory, University of California, Berkeley, CA 94720, USA
author
  • Materials Science Division, Lawrence Berkeley Laboratory, University of California, Berkeley, CA 94720, USA
  • A. Soltan Institute For Nuclear Studies, Hoża 69, 00-681 Warszawa, Poland
References
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv87z229kz
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