CVD Diamond Films Quality Characterization by ESR, SEM and Raman Spectroscopy

• Authors: K. Fabisiak , J. Patyk , F. Rozpłoch
• Languages of publication: EN

Abstracts

EN

Polycrystalline diamond films were deposited by electron assisted hot filament chemical vapor deposition method on (001) Si substrate using a mixture of propane-butane and hydrogen as working gas. In morphology investigation of diamond films using scanning electron microscope, it was found that diamond film morphology is changing from (111), for hydrocarbon concentration below 0.5 vol.%, via (100) to the so-called "ball-like" structure. The diamond film quality and defect structures in it were investigated by Raman and electron spin resonance spectroscopy for the purpose of obtaining basic knowledge which will aid the growth of defect free epitaxial diamond film for electronic and optical applications.

Keywords

EN

61.50.Jr

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 1995
• Volume: 87
• Issue: 1
• Pages: 145-149

Dates

published

1995-01

Contributors

author

K. Fabisiak

• Institute of Physics, N. Copernicus University, Grudziądzka 5/7, 87-100 Toruń, Poland

author

J. Patyk

• Institute of Physics, N. Copernicus University, Grudziądzka 5/7, 87-100 Toruń, Poland

author

F. Rozpłoch

• Institute of Physics, N. Copernicus University, Grudziądzka 5/7, 87-100 Toruń, Poland

Identifiers

DOI

10.12693/APhysPolA.87.145