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1995 | 87 | 1 | 145-149
Article title

CVD Diamond Films Quality Characterization by ESR, SEM and Raman Spectroscopy

Content
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EN
Abstracts
EN
Polycrystalline diamond films were deposited by electron assisted hot filament chemical vapor deposition method on (001) Si substrate using a mixture of propane-butane and hydrogen as working gas. In morphology investigation of diamond films using scanning electron microscope, it was found that diamond film morphology is changing from (111), for hydrocarbon concentration below 0.5 vol.%, via (100) to the so-called "ball-like" structure. The diamond film quality and defect structures in it were investigated by Raman and electron spin resonance spectroscopy for the purpose of obtaining basic knowledge which will aid the growth of defect free epitaxial diamond film for electronic and optical applications.
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EN
Publisher

Year
Volume
87
Issue
1
Pages
145-149
Physical description
Dates
published
1995-01
Contributors
author
  • Institute of Physics, N. Copernicus University, Grudziądzka 5/7, 87-100 Toruń, Poland
author
  • Institute of Physics, N. Copernicus University, Grudziądzka 5/7, 87-100 Toruń, Poland
author
  • Institute of Physics, N. Copernicus University, Grudziądzka 5/7, 87-100 Toruń, Poland
References
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Publication order reference
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YADDA identifier
bwmeta1.element.bwnjournal-article-appv87z116kz
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