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1994 | 86 | 4 | 597-603
Article title

Structure Perfection Study of Crystals Containing Micro- and Macrodistortions by X-Ray Acoustic Method

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EN
Abstracts
EN
The X-ray acoustic method for determination the structure perfection integral characteristics is suggested for slightly imperfect dislocation-free crystals. The method is suitable for investigation of a crystal disturbed both by localized (microdefects) and by distributed (macrostrains) structure defects. It is based on the analysis of dependence of the distance Δx between two minima, arising in the spatial intensity profile I(x) of the X-ray beam diffracted by acoustically excited crystal, upon ultrasound frequency vs. Using the data Δx(v_{s}) for two selected reflections, we calculated the values of the extinction lengths Λ which enabled us to identify the predominate type of structure disturbances as well as to estimate the static Debye-Waller factors e^{-L} and the period of the main macrodeformation λ_{M} for a sample containing simultaneously microdefects and periodic long range deformations. Such approach was used for studying the structure perfection of Czochralski-grown (Cz) and float-zone (FZ) silicon crystals.
Keywords
EN
Publisher

Year
Volume
86
Issue
4
Pages
597-603
Physical description
Dates
published
1994-10
Contributors
author
  • Institute of Semiconductor Physics, National Academy of Sciences, Prospekt Nauki 45, 252028 Kiev-28, Ukraine
  • Institute of Semiconductor Physics, National Academy of Sciences, Prospekt Nauki 45, 252028 Kiev-28, Ukraine
author
  • Institute of Semiconductor Physics, National Academy of Sciences, Prospekt Nauki 45, 252028 Kiev-28, Ukraine
References
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Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv86z416kz
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