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1993 | 84 | 4 | 777-780
Article title

In Situ Monitoring of Electroepitaxial Growth of Thick AlGaAs Layers

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Content
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Languages of publication
EN
Abstracts
EN
In situ growth monitoring technique has been used to analyse growth disturbances during the liquid phase electroepitaxial growth of thick AlGaAs layers. It allowed us to explain the nature of growth instability occurring at the end of the growth and affecting the maximum thickness of AlGaAs layers obtainable by liquid phase electroepitaxy.
Keywords
EN
Publisher

Year
Volume
84
Issue
4
Pages
777-780
Physical description
Dates
published
1993-10
Contributors
  • Institute of Physics, Polish Academy of Sciences, Al. Lotników 32/46, 02-668 Warszawa, Poland
References
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv84z441kz
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