Calcul des contraintes dans une couche mince deposee sur un substrat

• Authors: G. Bertholon , C. Dupuy , C. Surry , R. Redon , H. Zahouani
• Languages of publication: EN

Abstracts

EN

CALCULATIONS OF THE CONSTRAINTS IN A THIN FILM DEPOSITED ON THE SUBSTRATE: The aim of the present paper is to give simple calculations of the constraints in a thin film deposited on the substrate. The thin film can be obtained by the recrystallization of the surface. It is considered in relation to its substrate, where the force is linearly proportional to the surface area of the film. On the other hand, it is considered to be under the action of a force related to the thermic and compressional constraints. The initial and final boundary conditions in the linearized model play an essential role in the model adopted.

Keywords

EN

68.55.-a

Discipline

• 68.55.-a: Thin film structure and morphology(for methods of thin film deposition, film growth and epitaxy, see 81.15.-z)

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 1993
• Volume: 83
• Issue: 5
• Pages: 581-585

Dates

published

1993-05

Contributors

author

G. Bertholon

• ENISE, 58 rue Jean Parot, Saint-Etienne 42023 cedex, France

author

C. Dupuy

• Université Claude Bernard-Lyon 1, Villeurbanne, 69622 cedex, France

author

C. Surry

• ENISE, 58 rue Jean Parot, Saint-Etienne 42023 cedex, France

author

R. Redon

• Université Claude Bernard-Lyon 1, Villeurbanne, 69622 cedex, France

author

H. Zahouani

• ENISE, 58 rue Jean Parot, Saint-Etienne 42023 cedex, France

Identifiers

DOI

10.12693/APhysPolA.83.581