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1993 | 83 | 1 | 81-86
Article title

SEM Characterization of Multilayer Structures

Content
Title variants
Languages of publication
EN
Abstracts
EN
The possibilities of non-destructive multilayer structure characterization using the backscattering electron and modulated cathodoluminescence modes of the SEM have been discussed. It is shown that these techniques allow one to measure the parameters of thin layers of the thickness of about 10 nm.
Keywords
EN
Year
Volume
83
Issue
1
Pages
81-86
Physical description
Dates
published
1993-01
received
1992-07-23
References
Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv83z108kz
Identifiers
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