Atomic Scale Morphology of Thin Au(Zn)/GaAs Ohmic Contacts

• Authors: E. Kamińska , A. Piotrowska , R. Żarecka , A. Barcz , E. Mizera , S. Kwiatkowski
• Languages of publication: EN

Abstracts

EN

Very thin Au(Zn) contacts to p-GaAs were studied by means of transmission electron microscopy and secondary ion mass spectrometry. It was found that such contacts when cap annealed became ohmic, even though the reaction between the metallization and GaAs is confined to a very close vicinity of the interface.

Keywords

EN

73.40.Ns

Discipline

• 73.40.Ns: Metal-nonmetal contacts

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 1992
• Volume: 82
• Issue: 5
• Pages: 853-856

Dates

published

1992-11

Contributors

author

E. Kamińska

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

A. Piotrowska

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

R. Żarecka

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

A. Barcz

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

E. Mizera

• Institute of Physics, Polish Academy of Sciences Al. Lotników 32/46, 02-668 Warszawa, Poland

author

S. Kwiatkowski

• Institute of Nuclear Studies, Hoża 69, 00-682 Warszawa, Poland

Identifiers

DOI

10.12693/APhysPolA.82.853