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1992 | 82 | 5 | 849-852
Article title

Investigation of Phosphorus Release during Annealing of Au Contacts to InP

Content
Title variants
Languages of publication
EN
Abstracts
EN
The analysis of phosphorus release from Au/InP contacts heat treated at temperature from the range 360-480°C showed that P evaporation accompanies any stage of contact reaction. The use of encapsulating layer during contact annealing suppresses the loss of phosphorus and changes the kinetics of thermally activated interfacial reaction.
Keywords
EN
Year
Volume
82
Issue
5
Pages
849-852
Physical description
Dates
published
1992-11
References
Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv82z532kz
Identifiers
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