Investigation of Phosphorus Release during Annealing of Au Contacts to InP

A. Piotrowska; E. Kamińska; S. Kwiatkowski; A. Turos

doi:10.12693/APhysPolA.82.849

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Journal

Acta Physica Polonica A

1992 | 82 | 5 | 849-852

Article title

Investigation of Phosphorus Release during Annealing of Au Contacts to InP

Authors

A. Piotrowska , E. Kamińska , S. Kwiatkowski , A. Turos

Content

http://przyrbwn.icm.edu.pl/APP/PDF/82/a082z5p32.pdf [remote]

Title variants

Languages of publication

Abstracts

The analysis of phosphorus release from Au/InP contacts heat treated at temperature from the range 360-480°C showed that P evaporation accompanies any stage of contact reaction. The use of encapsulating layer during contact annealing suppresses the loss of phosphorus and changes the kinetics of thermally activated interfacial reaction.

Keywords

73.40.Ns

Publisher

Institute of Physics, Polish Academy of Sciences

Journal

Acta Physica Polonica A

Year

1992

Volume

Issue

Pages

849-852

Physical description

Dates

published

1992-11

References

Document Type

Publication order reference

YADDA identifier

bwmeta1.element.bwnjournal-article-appv82z532kz

Identifiers

DOI

10.12693/APhysPolA.82.849