Investigation of Phosphorus Release during Annealing of Au Contacts to InP

Piotrowska, A.; Kamińska, E.; Kwiatkowski, S.; Turos, A.

doi:10.12693/APhysPolA.82.849

Journal

Acta Physica Polonica A

1992 | 82 | 5 | 849-852

Article title

Investigation of Phosphorus Release during Annealing of Au Contacts to InP

Authors

A. Piotrowska , E. Kamińska , S. Kwiatkowski , A. Turos

Content

Full texts:

http://przyrbwn.icm.edu.pl/APP/PDF/82/a082z5p32.pdf [remote]

Title variants

Languages of publication

Abstracts

The analysis of phosphorus release from Au/InP contacts heat treated at temperature from the range 360-480°C showed that P evaporation accompanies any stage of contact reaction. The use of encapsulating layer during contact annealing suppresses the loss of phosphorus and changes the kinetics of thermally activated interfacial reaction.

Keywords

73.40.Ns

Discipline

73.40.Ns: Metal-nonmetal contacts

Publisher

Journal

Acta Physica Polonica A

Year

1992

Volume

Issue

Pages

849-852

Physical description

Dates

published

1992-11

Contributors

author

A. Piotrowska

Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

E. Kamińska

Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

S. Kwiatkowski

Institute of Nuclear Studies, Hoża 69, 00-682 Warszawa, Poland

author

A. Turos

Institute of Nuclear Studies, Hoża 69, 00-682 Warszawa, Poland

References

Document Type

Publication order reference

Identifiers

DOI

10.12693/APhysPolA.82.849

YADDA identifier

bwmeta1.element.bwnjournal-article-appv82z532kz