Journal
Article title
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Abstracts
The analysis of phosphorus release from Au/InP contacts heat treated at temperature from the range 360-480°C showed that P evaporation accompanies any stage of contact reaction. The use of encapsulating layer during contact annealing suppresses the loss of phosphorus and changes the kinetics of thermally activated interfacial reaction.
Keywords
Discipline
Journal
Year
Volume
Issue
Pages
849-852
Physical description
Dates
published
1992-11
Contributors
author
- Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland
author
- Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland
author
- Institute of Nuclear Studies, Hoża 69, 00-682 Warszawa, Poland
author
- Institute of Nuclear Studies, Hoża 69, 00-682 Warszawa, Poland
References
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv82z532kz