Direct Measurements of Arsenic and Phosphorus Evolution During Cap-Annealing of Gold-Based Metallizations on GaAs and InP

• Authors: A. Piotrowska , E. Kamińska , M. Guziewicz , R. Veresegyhazy , I. Mojzes , B. Pecz
• Languages of publication: EN

Abstracts

EN

Evolution of arsenic and phosphorus during heat treatment of unprotected and encapsulated Au, AuZn and AuGeNi contacts on GaAs and InP has been examined and correlated with their ohmic behavior.

Keywords

EN

73.40.Ns

Discipline

• 73.40.Ns: Metal-nonmetal contacts

• Publisher: Institute of Physics, Polish Academy of Sciences
• Journal: Acta Physica Polonica A
• Year: 1991
• Volume: 80
• Issue: 3
• Pages: 457-460

Dates

published

1991-09

Contributors

author

A. Piotrowska

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

E. Kamińska

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

M. Guziewicz

• Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland

author

R. Veresegyhazy

• Research Institute for Technical Physics, Hungarian Academy of Sciences, 1325 Budapest, P.O. Box 76, Hungary

author

I. Mojzes

• Research Institute for Technical Physics, Hungarian Academy of Sciences, 1325 Budapest, P.O. Box 76, Hungary

author

B. Pecz

• Research Institute for Technical Physics, Hungarian Academy of Sciences, 1325 Budapest, P.O. Box 76, Hungary

Identifiers

DOI

10.12693/APhysPolA.80.457