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1991 | 80 | 3 | 457-460
Article title

Direct Measurements of Arsenic and Phosphorus Evolution During Cap-Annealing of Gold-Based Metallizations on GaAs and InP

Content
Title variants
Languages of publication
EN
Abstracts
EN
Evolution of arsenic and phosphorus during heat treatment of unprotected and encapsulated Au, AuZn and AuGeNi contacts on GaAs and InP has been examined and correlated with their ohmic behavior.
Keywords
EN
Publisher

Year
Volume
80
Issue
3
Pages
457-460
Physical description
Dates
published
1991-09
Contributors
author
  • Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland
author
  • Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland
author
  • Institute of Electron Technology, Al. Lotników 32/46, 02-668 Warszawa, Poland
  • Research Institute for Technical Physics, Hungarian Academy of Sciences, 1325 Budapest, P.O. Box 76, Hungary
author
  • Research Institute for Technical Physics, Hungarian Academy of Sciences, 1325 Budapest, P.O. Box 76, Hungary
author
  • Research Institute for Technical Physics, Hungarian Academy of Sciences, 1325 Budapest, P.O. Box 76, Hungary
References
Document Type
Publication order reference
Identifiers
YADDA identifier
bwmeta1.element.bwnjournal-article-appv80z337kz
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