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1991 | 80 | 3 | 457-460
Article title

Direct Measurements of Arsenic and Phosphorus Evolution During Cap-Annealing of Gold-Based Metallizations on GaAs and InP

Content
Title variants
Languages of publication
EN
Abstracts
EN
Evolution of arsenic and phosphorus during heat treatment of unprotected and encapsulated Au, AuZn and AuGeNi contacts on GaAs and InP has been examined and correlated with their ohmic behavior.
Keywords
EN
Year
Volume
80
Issue
3
Pages
457-460
Physical description
Dates
published
1991-09
References
Document Type
Publication order reference
YADDA identifier
bwmeta1.element.bwnjournal-article-appv80z337kz
Identifiers
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